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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article
Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance
  • Jang, Il Ryu ; 
  • Kim, Hyeong-U ; 
  • Kim, Taehoon ; 
  • Kweun, Minwoo ; 
  • Eom, Geon Woong ; 
  • Park, In Yong ; 
  • Lee, Sangho ; 
  • Kim, Seongho ; 
  • Kang, Minji ; 
  • Park, Kyeong Jun ; 
    • et al
  • 2025-03
  • Jang, Il Ryu. (2025-03). Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance. Sensors and Actuators A: Physical, 383. doi: 10.1016/j.sna.2024.116181
  • Elsevier
  • View : 146
  • Download : 0
Article
Machine Learning Based on Digital Image Colorimetry Driven In Situ, Noncontact Plasma Etch Depth Prediction
  • Kang, Minji ; 
  • Kim, Seongho ; 
  • Go, Eunseo ; 
  • Paek, Donghyeon ; 
  • Lim, Geon ; 
  • Kim, Muyoung ; 
  • Kim, Changmin ; 
  • Kim, Soyeun ; 
  • Jang, Sung Kyu ; 
  • Bak, Moon Soo ; 
    • et al
  • ACCEPT
  • Advanced Intelligent Systems
  • Wiley
  • View : 33
  • Download : 0
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