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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article
Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance
  • Jang, Il Ryu ; 
  • Kim, Hyeong-U ; 
  • Kim, Taehoon ; 
  • Kweun, Minwoo ; 
  • Eom, Geon Woong ; 
  • Park, In Yong ; 
  • Lee, Sangho ; 
  • Kim, Seongho ; 
  • Kang, Minji ; 
  • Park, Kyeong Jun ; 
    • et al
  • 2025-03
  • Jang, Il Ryu. (2025-03). Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance. Sensors and Actuators A: Physical, 383. doi: 10.1016/j.sna.2024.116181
  • Elsevier
  • View : 255
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