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Article
Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches
  • Nguyen, Chi Thang ; 
  • Gu, Bonwook ; 
  • Cheon, Taehoon ; 
  • Park, Jeongwoo ; 
  • Khan, Mohammad Rizwan ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2021-06
  • Nguyen, Chi Thang. (2021-06). Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches. Chemistry of Materials, 33(12), 4435–4444. doi: 10.1021/acs.chemmater.1c00508
  • American Chemical Society
  • View : 461
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Article
Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects
  • Nguyen, Chi Thang ; 
  • Kim, Miso ; 
  • Kim, Youn-Hye ; 
  • Cheon, Taehoon ; 
  • Trinh, Ngoc Le ; 
  • Kim, Sehee ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2025-12
  • Chemistry of Materials, v.37, no.24, pp.9745 - 9757
  • American Chemical Society
  • View : 129
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Article
Functionalization of Si3N4 with an aldehyde inhibitor for area selective deposition of HfO2 and SiO2
  • Lee, Byungchan ; 
  • Shim, Seungwon ; 
  • Trinh, Ngoc Le ; 
  • Patil, Aravind H. ; 
  • Nguyen, Chi Thang ; 
  • Cheon, Taehoon ; 
  • Kim, Soo-Hyun ; 
  • Kang, Youngho ; 
  • Lee, Han-Bo-Ram
  • 2025-09
  • Journal of Materials Chemistry C, v.13, no.37, pp.19316 - 19329
  • Royal Society of Chemistry
  • View : 222
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