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Conference
High-Performance Monolithic 3D CMOS Enabled by Orientation-Aligned Seedless Laser Crystallization and Ultra-Shallow Laser Activation
  • Park, Jongyoun ; 
  • Jeong, Heejae ; 
  • Park, Euyjin ; 
  • Park, Geuntae ; 
  • Ahn, Chunghyun ; 
  • Lee, Sangsu ; 
  • Kwon, Hyuk-Jun ; 
  • Yu, Hyun-Yong
  • 2025-06-12
  • 2025 Symposium on VLSI Technology and Circuits, pp.1 - 3
  • Institute of Electrical and Electronics Engineers
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