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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article
Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects
  • Nguyen, Chi Thang ; 
  • Kim, Miso ; 
  • Kim, Youn-Hye ; 
  • Cheon, Taehoon ; 
  • Trinh, Ngoc Le ; 
  • Kim, Sehee ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2025-12
  • Chemistry of Materials, v.37, no.24, pp.9745 - 9757
  • American Chemical Society
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  • Download : 0
Article
Functionalization of Si3N4 with an aldehyde inhibitor for area selective deposition of HfO2 and SiO2
  • Lee, Byungchan ; 
  • Shim, Seungwon ; 
  • Trinh, Ngoc Le ; 
  • Patil, Aravind H. ; 
  • Nguyen, Chi Thang ; 
  • Cheon, Taehoon ; 
  • Kim, Soo-Hyun ; 
  • Kang, Youngho ; 
  • Lee, Han-Bo-Ram
  • 2025-09
  • Journal of Materials Chemistry C, v.13, no.37, pp.19316 - 19329
  • Royal Society of Chemistry
  • View : 108
  • Download : 0
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