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Article
32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry
  • Han, Sangyoon ; 
  • Beguelin, Jeremy ; 
  • Ochikubo, Lane ; 
  • Jacobs, John ; 
  • Seok, Tae Joon ; 
  • Yu, Kyoungsik ; 
  • Quack, Niels ; 
  • Kim, Chang-Kyu ; 
  • Muller, Richard S. ; 
  • Wu, Ming C.
  • 2021-04
  • Han, Sangyoon. (2021-04). 32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry. Journal of Optical Microsystems, 1(2). doi: 10.1117/1.JOM.1.2.024003
  • SPIE
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