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Article

MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate

Jang, Jongmoon ;
Jang, Jeong Hun ;
Choi, Hongsoo

2017-07
Jang, Jongmoon. (2017-07). MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate. Journal of Micromechanics and Microengineering, 27(7). doi: 10.1088/1361-6439/aa7236
Institute of Physics Publishing
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