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Article
Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition
  • Park, Ji-Yoon ; 
  • Yeo, Seungmin ; 
  • Cheon, Taehoon ; 
  • Kim, Soo-Hyun ; 
  • Kim, Min-Kyu ; 
  • Kim, Hyungjun ; 
  • Hong, Tae Eun ; 
  • Lee, Do-Joong
  • 2014-10-15
  • Park, Ji-Yoon. (2014-10-15). Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition. Journal of Alloys and Compounds, 610, 529–539. doi: 10.1016/j.jallcom.2014.04.186
  • Elsevier
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