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Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects
  • Nguyen, Chi Thang ; 
  • Kim, Miso ; 
  • Kim, Youn-Hye ; 
  • Cheon, Taehoon ; 
  • Trinh, Ngoc Le ; 
  • Kim, Sehee ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2025-12
  • Chemistry of Materials, v.37, no.24, pp.9745 - 9757
  • American Chemical Society
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