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Low-Temperature Nanosecond Laser Process of HZO-IGZO FeFETs toward Monolithic 3D System on Chip Integration
  • Kim, Dongsu ; 
  • Jeong, Heejae ; 
  • Pyo, Goeun ; 
  • Heo, Su Jin ; 
  • Baik, Seunghun ; 
  • Kim, Seonhyoung ; 
  • Choi, Hong Soo ; 
  • Kwon, Hyuk-Jun ; 
  • Jang, Jae Eun
  • 2024-07
  • Kim, Dongsu. (2024-07). Low-Temperature Nanosecond Laser Process of HZO-IGZO FeFETs toward Monolithic 3D System on Chip Integration. Advanced Science, 11(28). doi: 10.1002/advs.202401250
  • Wiley
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