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Article
Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity
  • Kim, Sangwon ; 
  • Song, Won Joon ; 
  • Tang, Jongmoon ; 
  • Jang, Jeong Hun ; 
  • Choi, Hongsoo
  • 2014-01
  • Kim, Sangwon. (2014-01). Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity. doi: 10.1007/s13391-013-3048-8
  • Korean Institute of Metals and Materials
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Article
MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
  • Jang, Jongmoon ; 
  • Jang, Jeong Hun ; 
  • Choi, Hongsoo
  • 2017-07
  • Jang, Jongmoon. (2017-07). MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate. Journal of Micromechanics and Microengineering, 27(7). doi: 10.1088/1361-6439/aa7236
  • Institute of Physics Publishing
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