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Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads
  • Choi, Ji-Seob ; 
  • Noh, Jinhong ; 
  • Choi, Hongsoo ; 
  • Yoon, Yong-Jin ; 
  • Park, Woo-Tae
  • 2024-03
  • Choi, Ji-Seob. (2024-03). Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads. International Journal of Precision Engineering and Manufacturing-Green Technology, 11(2), 481–489. doi: 10.1007/s40684-023-00559-8
  • Korean Society for Precision Engineeing
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