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Article
Heavily phosphorus doped germanium with local strain compensation effect by Co-implantation and rapid thermal process
  • 2024-05
  • Baik, Seunghun. (2024-05). Heavily phosphorus doped germanium with local strain compensation effect by Co-implantation and rapid thermal process. Journal of Alloys and Compounds, 984. doi: 10.1016/j.jallcom.2024.173952
  • Elsevier
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