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Optimization of metal-assisted chemical etching process in fabrication of p-type silicon wire arrays
- Choi, Ho-Jin ;
- Baek, Seongho ;
- Jang, Hwan Soo ;
- Kim, Seong Been ;
- Oh, Byeong-Yun ;
- Kim, Jae Hyun
- 2011-01
- Choi, Ho-Jin. (2011-01). Optimization of metal-assisted chemical etching process in fabrication of p-type silicon wire arrays. doi: 10.1016/j.cap.2010.11.047
- Elsevier B.V.
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