Showing results 1 to 2 of 2
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Yeon, Ara
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Yeo, Hong Goo
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Roh, Yongrae
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Kim, Kyungseop
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Seo, Hee-Seon
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Choi, Hongsoo
- 2021-12
- Yeon, Ara. (2021-12). A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern. Sensors and Actuators A: Physical, 332. doi: 10.1016/j.sna.2021.113129
- Elsevier
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Kim, Seonhyoung
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Yeo, Hong Goo
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Ryu, Jungho
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Choi, Hongsoo
- 2023-03
- Kim, Seonhyoung. (2023-03). Fabrication of surface-micromachined circular piezoelectric micromachined ultrasonic transducers with various etching holes using XeF2 and simulation of their vibrational characteristics. Sensors and Actuators A: Physical, 351. doi: 10.1016/j.sna.2023.114159
- Elsevier
- View : 212
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