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Article
Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp
  • Jang, Hwan Soo ; 
  • Kim, Gee Hong ; 
  • Lee, Jaejong ; 
  • Choi, Kee Bong
  • 2010-11
  • Jang, Hwan Soo. (2010-11). Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp. Current Applied Physics, 10(6), 1436–1441. doi: 10.1016/j.cap.2010.05.009
  • Elsevier B.V.
  • View : 804
  • Download : 0
Article
Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp
  • Jang, Hwan Soo ; 
  • Kim, Gee Hong ; 
  • Lee, Jaejong ; 
  • Choi, Kee Bong
  • 2010-11
  • Jang, Hwan Soo. (2010-11). Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp. Current Applied Physics, 10(6), 1436–1441. doi: 10.1016/j.cap.2010.05.009
  • Elsevier B.V.
  • View : 924
  • Download : 0
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