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Article
Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp
  • Jang, Hwan Soo ; 
  • Kim, Gee Hong ; 
  • Lee, Jaejong ; 
  • Choi, Kee Bong
  • 2010-11
  • Jang, Hwan Soo. (2010-11). Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp. Current Applied Physics, 10(6), 1436–1441. doi: 10.1016/j.cap.2010.05.009
  • Elsevier B.V.
  • View : 804
  • Download : 0
Article
Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp
  • Jang, Hwan Soo ; 
  • Kim, Gee Hong ; 
  • Lee, Jaejong ; 
  • Choi, Kee Bong
  • 2010-11
  • Jang, Hwan Soo. (2010-11). Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp. Current Applied Physics, 10(6), 1436–1441. doi: 10.1016/j.cap.2010.05.009
  • Elsevier B.V.
  • View : 924
  • Download : 0
Article
Fabrication and Characterization of Erbium-Doped Fluoropolymer Patterns via UV-Nanoimprint Lithography for Use in Planar Optical Amplifiers
  • Kim, Wook Hyun ; 
  • Choi, Myung-Seok ; 
  • Han, Yoon Soo
  • 2011-10
  • Kim, Wook Hyun. (2011-10). Fabrication and Characterization of Erbium-Doped Fluoropolymer Patterns via UV-Nanoimprint Lithography for Use in Planar Optical Amplifiers. doi: 10.1080/15421406.2011.601201
  • Taylor and Francis Ltd.
  • View : 926
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