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Fabrication and characterization of thickness mode piezoelectric micromachined ultrasonic transducer (Tm-pMUT) based on PMN-PZT

  • Kang, Woo Jin
  • 2016
  • Kang, Woo Jin. (2016). Fabrication and characterization of thickness mode piezoelectric micromachined ultrasonic transducer (Tm-pMUT) based on PMN-PZT. doi: 10.22677/thesis.2229789
  • DGIST
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