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Article
Realization of a 2H–Si microneedle with an ultrafast growth rate of 6.7 × 104 Å·s−1
  • Mun, Suhyun ; 
  • Kim, Kyoung Hwa ; 
  • Park, Seonwoo ; 
  • Jeon, Injun ; 
  • Jeon, Hunsoo ; 
  • Lee, Jae Hak ; 
  • Yang, Min ; 
  • Shin, Myeong-Cheol ; 
  • Oh, Jong-Min ; 
  • Shin, Weon Ho ; 
    • et al
  • 2025-03
  • Mun, Suhyun. (2025-03). Realization of a 2H–Si microneedle with an ultrafast growth rate of 6.7 × 104 Å·s−1. Semiconductor Science and Technology, 40(3). doi: 10.1088/1361-6641/ada9c9
  • Institute of Physics Publishing
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