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Fabrication of surface-micromachined circular piezoelectric micromachined ultrasonic transducers with various etching holes using XeF2 and simulation of their vibrational characteristics
  • Kim, Seonhyoung ; 
  • Yeo, Hong Goo ; 
  • Ryu, Jungho ; 
  • Choi, Hongsoo
  • 2023-03
  • Kim, Seonhyoung. (2023-03). Fabrication of surface-micromachined circular piezoelectric micromachined ultrasonic transducers with various etching holes using XeF2 and simulation of their vibrational characteristics. Sensors and Actuators A: Physical, 351. doi: 10.1016/j.sna.2023.114159
  • Elsevier
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