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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article
Influence of post-annealing on structural, optical and electrical properties of tin nitride thin films prepared by atomic layer deposition
  • Ansari, M.Z. ; 
  • Janicek, P. ; 
  • Nandi, D.K. ; 
  • Palka, K. ; 
  • Slang, S. ; 
  • Kim, D.H. ; 
  • Cheon, T. ; 
  • Kim, S.-H.
  • 2021-02
  • Ansari, M.Z. (2021-02). Influence of post-annealing on structural, optical and electrical properties of tin nitride thin films prepared by atomic layer deposition. Applied Surface Science, 538, 147920. doi: 10.1016/j.apsusc.2020.147920
  • Elsevier B.V.
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