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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article
Fabrication of low-stress silicon nitride film for application to biochemical sensor array
  • Shon, Yeong Soo
  • 2005
  • Shon, Yeong Soo. (2005). Fabrication of low-stress silicon nitride film for application to biochemical sensor array. doi: 10.5369/JSST.2005.14.5.357
  • The Korean Sensors Society
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