Browsing by Titles

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 1 of 1

Article
Fabrication of low-stress silicon nitride film for application to biochemical sensor array
  • Shon, Yeong Soo
  • 2005
  • Shon, Yeong Soo. (2005). Fabrication of low-stress silicon nitride film for application to biochemical sensor array. doi: 10.5369/JSST.2005.14.5.357
  • The Korean Sensors Society
  • View : 500
  • Download : 0
1