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Characterization of an advanced MEMS artificial basilar membrane using XeF2 etching in the air and fluid

Thesis
Characterization of an advanced MEMS artificial basilar membrane using XeF2 etching in the air and fluid
  • Jeon, Hye Jin
  • 2016
  • Jeon, Hye Jin. (2016). Characterization of an advanced MEMS artificial basilar membrane using XeF2 etching in the air and fluid. doi: 10.22677/thesis.2229784
  • DGIST
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