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Article
Silicon Etching Using Copper-Metal-Assisted Chemical Etching: Unveiling the Role of Cu2O in Microscale Structure Fabrication
  • Lee, Eunsol ; 
  • Park, Sangseung ; 
  • Park, Gyeong-Su ; 
  • Mehta, Minisha ; 
  • Lee, Lawrence Yoon Suk ; 
  • Kim, Changsoon ; 
  • Choi, In-Suk
  • 2025-01
  • Lee, Eunsol. (2025-01). Silicon Etching Using Copper-Metal-Assisted Chemical Etching: Unveiling the Role of Cu2O in Microscale Structure Fabrication. ACS Applied Materials & Interfaces, 17(1), 2566–2576. doi: 10.1021/acsami.4c17500
  • American Chemical Society
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