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Highly Bendable Planar Hall Resistance Sensor

Title
Highly Bendable Planar Hall Resistance Sensor
Authors
Kim, MijinOh, SunjongJeong, WooseongTalantsev, ArtemJeon, TaehyeongChaturvedi, RichaLee, SungwonKim, CheolGi
DGIST Authors
Lee, SungwonKim, CheolGi
Issue Date
2020-01
Citation
IEEE Magnetics Letters, 11, 4100705
Type
Article
Article Type
Article
Author Keywords
Magneto-electronicsmagnetic sensorsHall effectanisotropic magnetoresistancemagnetic films
Keywords
PARYLENE-C
ISSN
1949-307X
Abstract
A set of Planar Hall Resistance (PHR) sensors has been fabricated on rigid and flexible substrates. High signal-to-noise ratio, low offset voltage, nearly zero hysteresis of signal and excellent linearity has been demonstrated for sensors, based on Ta (5 nm)/NiFe (10 nm)/IrMn (10 nm)/Ta (5 nm) thin films, grown on PDMS and Parylene C polymeric substrates. Effect of bending on the performance of the PHR sensors has been studied. The effect of bending deformation on the performance characteristics of the fabricated PHR sensors is reversible until the bending angle reaches a critical one. The critical bending angle is shown to be dependent on the substrate composition. An irreversible deformation of sensor's film, accompanied by the formation of wrinkles and cracks, occurs when the bending angle exceeds the critical one. This deformation originates from the difference between the values of Young's modulus of the substrate and the film. The bending stability of PHR sensor, grown on PDMS substrate, has been improved by deposition of 1 μm of Parylene C both as a buffer and as a capping layer. The performance characteristics of the designed shapeable PHR sensors are compatible with requirements for applications in wearable electronics and medical diagnostic devices. IEEE
URI
http://hdl.handle.net/20.500.11750/11428
DOI
10.1109/LMAG.2020.2966422
Publisher
Institute of Electrical and Electronics Engineers
Related Researcher
  • Author Kim, CheolGi Lab for NanoBio-MatErials & SpinTronics(nBEST)
  • Research Interests Magnetic Materials and Spintronics; Converging Technology of Nanomaterials and Biomaterials; Bio-NEMS;MEMS
Files:
There are no files associated with this item.
Collection:
Department of Emerging Materials ScienceBio-Harmonized Device Lab1. Journal Articles
Department of Emerging Materials ScienceLab for NanoBio-Materials & SpinTronics(nBEST)1. Journal Articles


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