Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김철기 | - |
dc.contributor.author | Changyeop Jeon | - |
dc.date.accessioned | 2020-06-22T16:02:08Z | - |
dc.date.available | 2020-06-22T16:02:08Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000285738 | en_US |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/11989 | - |
dc.description | Magnetoresistive sensor,Planar hall effect,Anisotropic magnetoresistance | - |
dc.description.statementofresponsibility | prohibition | - |
dc.description.tableofcontents | Abstract i List of contents ii List of figures iv Ⅰ. Introduction 1 Ⅱ. Theoretical background 2 2.1 MR (Magnetoresistance) Sensor 2 2.1.1 AMR, PHR Sensor 2 Ⅲ. Experiment 4 3.1 Fabrication of Pattern 4 3.1.1 Lift-off Process 4 3.1.2 Photolithography 4 3.1.2 Sputtering 7 3.2.2.1 Diode sputtering 8 3.2.2.2 Magnetron sputtering 10 3.3 Characterization techniques 11 3.3.1 MR (Magnetoresistance) Measurement 11 3.3.2 VSM (Vibrating sample magnetometer) 13 Ⅳ. Result & Discussion 14 4.1 Meshed PHR sensor 14 4.1.1 Sensor characteristics 15 4.2 Bridge geometry effect in Meshed sensor. 17 4.2.1 Sensor characteristics 18 4.3 Tilted junction of Meshed sensor 21 4.3.1 Tilted junction in voltage line 22 4.3.2 Tilted junction in current and voltage line 24 Ⅴ. Conclusion 28 References 29 Summary 33 |
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dc.format.extent | 42 | - |
dc.language | eng | - |
dc.publisher | DGIST | - |
dc.title | Fabrication and analysis of micro-mesh patterned PHR sensor | - |
dc.title.alternative | 마이크로 패턴 PHR 센서의 제작 및 특성 분석 | - |
dc.type | Thesis | - |
dc.identifier.doi | 10.22677/Theses.200000285738 | - |
dc.description.degree | Master | - |
dc.contributor.department | Emerging Materials Science | - |
dc.contributor.coadvisor | Jung Rok Lee | - |
dc.date.awarded | 2020-02 | - |
dc.publisher.location | Daegu | - |
dc.description.database | dCollection | - |
dc.citation | XT.MM 전82 202002 | - |
dc.date.accepted | 2020-01-20 | - |
dc.contributor.alternativeDepartment | 신물질과학전공 | - |
dc.embargo.liftdate | 2024-12-31 | - |
dc.contributor.affiliatedAuthor | Jeon, Changyeop | - |
dc.contributor.affiliatedAuthor | Lee, Jung Rok | - |
dc.contributor.affiliatedAuthor | Kim, CheolGi | - |
dc.contributor.alternativeName | 전창엽 | - |
dc.contributor.alternativeName | 이정록 | - |
dc.contributor.alternativeName | CheolGi Kim | - |
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