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dc.contributor.advisor 김철기 -
dc.contributor.author Changyeop Jeon -
dc.date.accessioned 2020-06-22T16:02:08Z -
dc.date.available 2020-06-22T16:02:08Z -
dc.date.issued 2020 -
dc.identifier.uri http://dgist.dcollection.net/common/orgView/200000285738 en_US
dc.identifier.uri http://hdl.handle.net/20.500.11750/11989 -
dc.description Magnetoresistive sensor,Planar hall effect,Anisotropic magnetoresistance -
dc.description.statementofresponsibility prohibition -
dc.description.tableofcontents Abstract i
List of contents ii
List of figures iv

Ⅰ. Introduction 1
Ⅱ. Theoretical background 2
2.1 MR (Magnetoresistance) Sensor 2
2.1.1 AMR, PHR Sensor 2
Ⅲ. Experiment 4
3.1 Fabrication of Pattern 4
3.1.1 Lift-off Process 4
3.1.2 Photolithography 4
3.1.2 Sputtering 7
3.2.2.1 Diode sputtering 8
3.2.2.2 Magnetron sputtering 10
3.3 Characterization techniques 11
3.3.1 MR (Magnetoresistance) Measurement 11
3.3.2 VSM (Vibrating sample magnetometer) 13
Ⅳ. Result & Discussion 14
4.1 Meshed PHR sensor 14
4.1.1 Sensor characteristics 15
4.2 Bridge geometry effect in Meshed sensor. 17
4.2.1 Sensor characteristics 18
4.3 Tilted junction of Meshed sensor 21
4.3.1 Tilted junction in voltage line 22
4.3.2 Tilted junction in current and voltage line 24
Ⅴ. Conclusion 28
References 29
Summary 33
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dc.format.extent 42 -
dc.language eng -
dc.publisher DGIST -
dc.title Fabrication and analysis of micro-mesh patterned PHR sensor -
dc.title.alternative 마이크로 패턴 PHR 센서의 제작 및 특성 분석 -
dc.type Thesis -
dc.identifier.doi 10.22677/Theses.200000285738 -
dc.description.degree Master -
dc.contributor.department Emerging Materials Science -
dc.contributor.coadvisor Jung Rok Lee -
dc.date.awarded 2020-02 -
dc.publisher.location Daegu -
dc.description.database dCollection -
dc.citation XT.MM 전82 202002 -
dc.date.accepted 2020-01-20 -
dc.contributor.alternativeDepartment 신물질과학전공 -
dc.embargo.liftdate 2024-12-31 -
dc.contributor.affiliatedAuthor Jeon, Changyeop -
dc.contributor.affiliatedAuthor Lee, Jung Rok -
dc.contributor.affiliatedAuthor Kim, CheolGi -
dc.contributor.alternativeName 전창엽 -
dc.contributor.alternativeName 이정록 -
dc.contributor.alternativeName CheolGi Kim -
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Department of Physics and Chemistry Theses Master

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