Fabrication and characterization of superconducting coplanar waveguide resonators
- Title
- Fabrication and characterization of superconducting coplanar waveguide resonators
- DGIST Authors
- Kim, Bongkeon; Jung, Minkyung; Kim, Jihwan; Suh, Junho; Doh, Yong-Joo
- Issue Date
- 2020-12
- Citation
- Progress in Superconductivity and Cryogenics, 22(4), 10-13
- Type
- Article
- Article Type
- Article
- Author Keywords
- Superconducting resonator; Coplanar waveguide; Circuit quantum electrodynamics
- Keywords
- Coplanar waveguides; Fabrication; Resonators; Superconducting devices; Fabrication and characterizations; Fabrication technique; Intrinsic quality factors; Quantum information device; Resonant characteristics; Semiconductor nanostructures; Superconducting qubits; Waveguide resonators; Superconducting resonators
- ISSN
- 1229-3008
- Abstract
- High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures. © 2020, Korea Institute of Applied Superconductivity and Cryogenics. All rights reserved.
- Publisher
- 한국초전도.저온공학회
- Related Researcher
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Jung, Minkyung Quantum Nanoelectronic Devices Lab
- Research Interests nanoelectronics, quantum transport, quantum physics, qubit, condensed matter physics,
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