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Fabrication and characterization of superconducting coplanar waveguide resonators

Title
Fabrication and characterization of superconducting coplanar waveguide resonators
Authors
Kim, BongkeonJung, MinkyungKim, JihwanSuh, JunhoDoh, Yong-Joo
DGIST Authors
Kim, Bongkeon; Jung, Minkyung; Kim, Jihwan; Suh, Junho; Doh, Yong-Joo
Issue Date
2020-12
Citation
Progress in Superconductivity and Cryogenics, 22(4), 10-13
Type
Article
Article Type
Article
Author Keywords
Superconducting resonatorCoplanar waveguideCircuit quantum electrodynamics
Keywords
Coplanar waveguidesFabricationResonatorsSuperconducting devicesFabrication and characterizationsFabrication techniqueIntrinsic quality factorsQuantum information deviceResonant characteristicsSemiconductor nanostructuresSuperconducting qubitsWaveguide resonatorsSuperconducting resonators
ISSN
1229-3008
Abstract
High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures. © 2020, Korea Institute of Applied Superconductivity and Cryogenics. All rights reserved.
URI
http://hdl.handle.net/20.500.11750/13035
DOI
10.9714/psac.2020.22.4.010
Publisher
한국초전도.저온공학회
Related Researcher
  • Author Jung, Minkyung Quantum Nanoelectronic Devices Lab
  • Research Interests nanoelectronics, quantum transport, quantum physics, qubit, condensed matter physics,
Files:
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Collection:
Division of NanotechnologyQuantum Nanoelectronic Devices Lab1. Journal Articles


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