Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Han, Sangyoon | - |
dc.contributor.author | Beguelin, Jeremy | - |
dc.contributor.author | Ochikubo, Lane | - |
dc.contributor.author | Jacobs, John | - |
dc.contributor.author | Seok, Tae Joon | - |
dc.contributor.author | Yu, Kyoungsik | - |
dc.contributor.author | Quack, Niels | - |
dc.contributor.author | Kim, Chang-Kyu | - |
dc.contributor.author | Muller, Richard S. | - |
dc.contributor.author | Wu, Ming C. | - |
dc.date.accessioned | 2021-11-05T08:30:11Z | - |
dc.date.available | 2021-11-05T08:30:11Z | - |
dc.date.created | 2021-10-21 | - |
dc.date.issued | 2021-04 | - |
dc.identifier.issn | 2708-5260 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/15761 | - |
dc.description.abstract | We report on a 32 x 32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-on-insulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 Vand the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. | - |
dc.language | English | - |
dc.publisher | SPIE | - |
dc.title | 32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry | - |
dc.type | Article | - |
dc.identifier.doi | 10.1117/1.JOM.1.2.024003 | - |
dc.identifier.bibliographicCitation | Journal of Optical Microsystems, v.1, no.2 | - |
dc.description.isOpenAccess | TRUE | - |
dc.subject.keywordAuthor | silicon photonics | - |
dc.subject.keywordAuthor | micro-electro-mechanical-system | - |
dc.subject.keywordAuthor | switch | - |
dc.subject.keywordAuthor | foundry | - |
dc.subject.keywordAuthor | directional coupler | - |
dc.citation.number | 2 | - |
dc.citation.title | Journal of Optical Microsystems | - |
dc.citation.volume | 1 | - |
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