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Design and Material Optimization of Magnetic Flux Concentrator for Enhanced Field Sensitivity of Magnetoresistive Sensor

Title
Design and Material Optimization of Magnetic Flux Concentrator for Enhanced Field Sensitivity of Magnetoresistive Sensor
Alternative Title
자기저항 센서의 자기장 감도 향상을 위한 자속 집중 장치 설계 및 재료 최적화
Author(s)
Jinwoo Kim
DGIST Authors
Jinwoo KimCheolGi KimDong Young Kim
Advisor
김철기
Co-Advisor(s)
Dong Young Kim
Issued Date
2021
Awarded Date
2021/02
Type
Thesis
Subject
Magnetic flux concentrator, Hysteresis, Exchange bias, Magnetoresistive sensor, 자속 집중 장치, 이력 현상, 교환 바이어스, 자기저항 센서
Abstract
MFC (Magnetic Flux Concentrator) is located around the sensor to guide the magnetic field and concentrate it on the sensor. This research developed MFC which thickness doesn’t exceed few micrometers and low hysteresis. The optimized value of the distance between the MFC poles was determined by magnetic simulation. Research has propose structures with small coercivity of MFC. Single-layer (Ta/NiFe/Ta) MFC, bilayer (Ta/NiFe/IrMn/Ta) MFC and trilayer ((Ta/NiFe/Cu/IrMn)n/Ta) MFC are compared. Significant reduction in coercivity has been demonstrated for both bilayer and trilayer MFC compared to single-layer MFC. In order to enhance the amplification factor, trilayer structure was repeated several times to increase the ferromagnetic layer thickness, and the effect of the number of repetitions was investigated.
Table Of Contents
I. Introduction 1
II. Theoretical Background 3
2.1 Sensitivity amplification by MFC 3
2.2 Exchange bias 6
III. Experimental Methods 8
3.1 Design of the MFC pattern 8
3.2 Fabrication of thin film pattern 8
3.3 Magnetoresistance measurement 14
3.4 VSM (Vibrating Sample Magnetometer) 15
IV. Result & Discussion 16
4.1 Design of the MFC pattern 16
4.1.1 Optimization of the distance between the MFC poles 16
4.1.2 MFC pattern for single-ring sensor 18
4.2 Optimization of the MFC structure 20
4.2.1 Single-layer MFC 21
4.2.2 Bilayer MFC 22
4.2.3 Trilayer MFC 24
4.3 Total output voltage change of the sensor signal with MFC 26
V. Conclusion 28
References 29
Summary 31
URI
http://dgist.dcollection.net/common/orgView/200000363830

http://hdl.handle.net/20.500.11750/16683
DOI
10.22677/thesis.200000363830
Degree
Master
Department
Emerging Materials Science
Publisher
DGIST
Related Researcher
  • 김철기 Kim, CheolGi
  • Research Interests Magnetic Materials and Spintronics; Converging Technology of Nanomaterials and Biomaterials; Bio-NEMS;MEMS
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Department of Physics and Chemistry Theses Master

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