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Highly Sensitive Gate/Body-Tied Metal-Oxide-Semiconductor Field-Effect Transistor-Type Photodetector with Wavelength-Selective Metal Grid Structure Using Standard Complementary Metal-Oxide-Semiconductor Technology
- Highly Sensitive Gate/Body-Tied Metal-Oxide-Semiconductor Field-Effect Transistor-Type Photodetector with Wavelength-Selective Metal Grid Structure Using Standard Complementary Metal-Oxide-Semiconductor Technology
- Lee, Hee Ho; Jo, Sung-Hyun; Bae, Myunghan; Choi, Byung-Soo; Kim, Jeongyeob; Lyu, Hong-Kun; Shin, Jang-Kyoo
- DGIST Authors
- Lyu, Hong-Kun
- Issue Date
- Sensors and Materials, 27(1), 135-142
- Article Type
- Dielectric Devices; Drain Current; Electric Breakdown; Electron Beam Lithography; Field Effect Transistors; Floating Gates; Gate/Body-Tied Mosfet-Type Photodetector; High-Sensitivity; Metal Grid; Metal Layer; Metallic Compounds; Metals; MOS-FET; MOS Devices; MOSFET Devices; Photodetectors; Photons; Semiconductor Device Manufacture; Standard Complementary Metaloxide-Semiconductor (CMOS) Technologies; Transistors; Wavelength-Selective; Wavelength-Selectivity
- In this research, a highly sensitive gate/body-tied metal-oxide-semiconductor field-effect transistor (MOSFET)-type photodetector with a wavelength-selective metal grid structure was designed and fabricated using 0.18-��m standard complementary metal-oxide-semiconductor technology. This device is composed of a floating gate that is tied to a well and a wavelength-selective metal grid is placed on top of each photodetector. The designed metal grid structure included one-dimensional and two-dimensional patterned metal layers. The amplified photocurrent of the gate/body-tied MOSFET-type photodetector was found to be more than 1000-fold that of a conventional n+/p-sub photodiode with the same area. To demonstrate the wavelength selectivity, we measured the drain current and transmittance of the photodetector as a function of wavelength.
- M Y U Scientific Publishing Division
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- Intelligent Devices and Systems Research Group1. Journal Articles
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