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Tunable Electrical and Optical Properties in Composition Controlled Hf:ZnO Thin Films Grown by Atomic Layer Deposition

Title
Tunable Electrical and Optical Properties in Composition Controlled Hf:ZnO Thin Films Grown by Atomic Layer Deposition
Author(s)
Ahn, Cheol HyounKim, Jae HyunCho, Hyung Koun
Issued Date
2012
Citation
Journal of the Electrochemical Society, v.159, no.4, pp.H384 - H387
Type
Article
Keywords
Atomic Layer DepositionBand EdgeBand GapsBurstein-Moss EffectsCrystallinitiesElectric ConductivityElectrical and Optical PropertiesElectrical ResistivityGa-Doped ZnOHafniumHigh-Electron-DensityHIGHLY TRANSPARENTMetallic FilmsOptical FilmsOptical PropertiesPhase SeparationPolycrystalline Thin FilmSemiconductor Quantum WellsSTABILITYThin FilmsTRANSISTORSTransparent Conductive OxidesVisible RegionX Ray Photoelectron SpectroscopyZinc OxideZnO Matrix
ISSN
0013-4651
Abstract
Hf:ZnO thin films doped with various Hf contents were prepared at 200°C by atomic layer deposition and assessed as transparent conductive oxides. Low Hf contents (≤6.7 at%) resulted in highly conductive polycrystalline thin films; high Hf contents reduced both crystallinity and conductivity due to the limited solubility of Hf in the ZnO matrix. The lowest electrical resistivity of 6 × 10 -4 Ω · cm and high electron density of 3 × 10 20 cm -3 were shown by the sample with 3.3 at% Hf. All the thin films showed ca. 80% transmittance in the visible region. The films' optical band-gaps increased from 3.29 to 3.56 eV with increasing Hf content up to 6.7 at%; further increases resulted in deviation from the Burstein-Moss effect and excess Hf incorporation induced two band edges due to phase separation, which was correlated with X-ray photoelectron spectroscopy and photoluminescence results. © 2012 The Electrochemical Society.
URI
http://hdl.handle.net/20.500.11750/2479
DOI
10.1149/2.026204jes
Publisher
Electrochemical Society
Related Researcher
  • 김재현 Kim, Jae Hyun
  • Research Interests 에너지; 배터리; 고체전해질; 태양전지; 전기차; 리튬이온배터리
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Division of Energy & Environmental Technology 1. Journal Articles

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