Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Jang, Hwan Soo | - |
dc.contributor.author | Choi, Ho-Jin | - |
dc.contributor.author | Kim, Jae Hyun | - |
dc.date.available | 2017-07-11T06:56:07Z | - |
dc.date.created | 2017-04-10 | - |
dc.date.issued | 2012-04 | - |
dc.identifier.citation | Journal of Nanoscience and Nanotechnology, v.12, no.4, pp.3567 - 3570 | - |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/3375 | - |
dc.description.abstract | We report on the fabrication of silicon nanostructures with a high aspect ratio that were created using a combination of electrochemical etching and alkaline etching. With this technique, we were able to fabricate nano- and/or micro-wire structures that are perfectly periodic over large areas of 3.14 cm 2. After porous silicon was created by electrochemical etching, the effect of post-alkaline etching was investigated to determine how changes in the etching time, solution concentration and temperature of the etchant influenced the silicon morphology. As a result, periodic silicon wire arrays with good vertical alignment were obtained, and these arrays had a width of less than 500 nm and/or a high aspect ratio of more than 20. © 2012 American Scientific Publishers. | - |
dc.language | English | - |
dc.publisher | American Scientific Publishers | - |
dc.title | Fabrication of p-Type Silicon Nanowire Arrays with a High Aspect Ratio Using Electrochemical and Alkaline Etching | - |
dc.type | Article | - |
dc.identifier.doi | 10.1166/jnn.2012.5591 | - |
dc.identifier.wosid | 000305850900121 | - |
dc.identifier.scopusid | 2-s2.0-84863299960 | - |
dc.type.local | Article(Overseas) | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.citation.publicationname | Journal of Nanoscience and Nanotechnology | - |
dc.contributor.nonIdAuthor | Jang, Hwan Soo | - |
dc.contributor.nonIdAuthor | Choi, Ho-Jin | - |
dc.identifier.citationVolume | 12 | - |
dc.identifier.citationNumber | 4 | - |
dc.identifier.citationStartPage | 3567 | - |
dc.identifier.citationEndPage | 3570 | - |
dc.identifier.citationTitle | Journal of Nanoscience and Nanotechnology | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.description.isOpenAccess | N | - |
dc.subject.keywordAuthor | Electrochemical Etching | - |
dc.subject.keywordAuthor | KOH Etching | - |
dc.subject.keywordAuthor | Nanowire | - |
dc.subject.keywordAuthor | p-Type silicon | - |
dc.subject.keywordPlus | SI WIRE ARRAYS | - |
dc.contributor.affiliatedAuthor | Jang, Hwan Soo | - |
dc.contributor.affiliatedAuthor | Choi, Ho-Jin | - |
dc.contributor.affiliatedAuthor | Kim, Jae Hyun | - |
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