A single panel LCoS microdisplay for mobile projectors

Abstract

A 0.55 SVGA single panel LCoS microdisplay for the applications to mobile projectors was fabricated. The Si backplane was prepared by 0.35um / 18V CMOS process. Twisted nematic (TN) liquid crystal was used as the light switch layer. The prepared the LCoS panel with field sequential color (FSC) driving scheme represented y-corrected 256 levels of gray scale. The preparation and characteristics of single panel TN-LCoS were described.