Ultra-Low-Power Unitary Matrix Multiplier Based on Silicon Photonic MEMS

Abstract

We propose and demonstrate an ultra-low-power 3×3 unitary matrix multiplier with MEMS-based tunable couplers and phase shifters. The static power consumption and tuning energy per tuning element are less than 0.13 µW and 115 pJ, respectively. © Optica Publishing Group 2022, © 2022 The Author(s)