Ultra-Low Power and Scalable Programmable Silicon Photonic MEMS

Abstract

We have experimentally demonstrated feedforward and recirculating FPPGAs with MEMS-tunable elements. The static power of the elements is less than 50 nW, and energy required to change the state of the actuator is 8 pJ. © Optica Publishing Group 2022, © 2022 The Author(s)