Fully Tunable Sagnac Loop Reflector with 0.1 µW Static Power Silicon Photonic MEMS

Abstract

We report on a MEMS-based integrated tunable Sagnac loop reflector having full reflectivity tuning from 0 to 100% with <0.1 µW static power consumption. A Fabry-Pérot cavity with fine linewidth tunability is also demonstrated. © Optica Publishing Group 2022, © 2022 The Author(s)