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Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption
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- Title
- Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption
- Issued Date
- 2023-05-09
- Citation
- Park, Young Jae. (2023-05-09). Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. Conference on Lasers and Electro-Optics, CLEO 2023, 1–2. doi: 10.1364/CLEO_SI.2023.STu3J.2
- Type
- Conference Paper
- ISBN
- 9781957171258
- ISSN
- 2162-2701
- Abstract
-
We report on a fully tunable Fabry-Perot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB. © Optica Publishing Group 2023 © 2023 The Author(s)
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- Publisher
- APS(American Physical Society), IEEE Photonics Society, Optica
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