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  Department of Robotics and Mechatronics Engineering Intelligent Nanophotonics Lab 2. Conference Papers
Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption
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Title
Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption
Issued Date
2023-05-09
Citation
Park, Young Jae. (2023-05-09). Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. Conference on Lasers and Electro-Optics, CLEO 2023, 1–2. doi: 10.1364/CLEO_SI.2023.STu3J.2
Type
Conference Paper
ISBN
9781957171258
ISSN
2162-2701
Abstract
We report on a fully tunable Fabry-Perot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB. © Optica Publishing Group 2023 © 2023 The Author(s)
URI
http://hdl.handle.net/20.500.11750/47682
DOI
10.1364/CLEO_SI.2023.STu3J.2
Publisher
APS(American Physical Society), IEEE Photonics Society, Optica
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한상윤
Han, Sangyoon한상윤

Department of Robotics and Mechatronics Engineering

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