Cited 14 time in webofscience Cited 16 time in scopus

Influence of top electrode design on pMUTs performance

Title
Influence of top electrode design on pMUTs performance
Authors
Choi, HongsooDalakoti, AbhishekBose, SusmitaBandyopadhyay, Amit
DGIST Authors
Choi, Hongsoo
Issue Date
2007-04
Citation
Sensors and Actuators, A: Physical, 135(2), 613-619
Type
Article
Article Type
Article
Keywords
MICROMACHINED ULTRASONIC TRANSDUCERSPZT THIN-FILMS
ISSN
0924-4247
Abstract
Piezoelectric micromachined ultrasonic transducers (pMUTs) were designed, fabricated and tested to measure resonance and anti-resonance frequencies, and quality factor. Film quality was monitored via saturation polarization, remnant polarization and coercive electric field measurements in different films. Effective coupling coefficient and device efficiency are calculated based on those measured values. Single and split top electrode pMUTs designs, X and Y, respectively, are evaluated to understand the influence of top electrode design on device performance. It was found that resonance frequency decreases with an increase in membrane width. Top electrodes, smaller than the membrane width by 10 μm, show a positive effect on the effective coupling coefficient of the pMUTs. It was found that both quality factor and device efficiency are maximized when top electrode width is the same as that of membrane width. An increase in top electrode dimension beyond the membrane decreases device performance. © 2006.
URI
http://hdl.handle.net/20.500.11750/4789
DOI
10.1016/j.sna.2006.08.022
Publisher
ELSEVIER SCIENCE SA
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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