Title

Development of Flexible Magnetic tactile sensing module for multifunctional applications

DGIST Authors

Mijin Kim ; CheolGi Kim ; Sungwon Lee

Advisor

김철기

Co-Advisor(s)

Sungwon Lee

Issued Date

2024

Awarded Date

2024-02-01

Citation

Mijin Kim. (2024). Development of Flexible Magnetic tactile sensing module for multifunctional applications. doi: 10.22677/THESIS.200000729006

Type

Thesis

Description

Magnetoresistive sensor; Flexible Tactile Sensor; Shear Force sensor; Pressure sensor; Magnetostriction effect

Table Of Contents

List of Contents
Abstract i
List of contents ii
List of tables · iii
List of figures iv

Ⅰ. INTRODUCTION
1.1 Background and Necessity of Tactile Sensor 1
1.2 Trends in Flexible Tactile Sensor 2
1.2.1 Capacitive flexible sensor 4
1.2.2 Piezoresistive flexible sensor 6
1.2.3 Triboelectric flexible sensor 7
1.2.4 Magnetoresistive flexible sensor 8
1.3 Motivation and Objectives of this Study 10
ⅠI. METHODOLOGY
2.1 Fabrication of Planar Hall Magnetoresistive sensing element 12
2.1.1 Polydimethysiloxane(PDMS) Polymerization process 12
2.1.2 Photolithography 13
2.1.3 DC Magnetron Sputtering 16
2.1.4 Lift-off Process 18
2.1.5 Parylene Coating Process 19
2.2 Measurement system 21
2.2.1 Sensor Profile Measurement 21
2.2.2 Vibrating Sample Magnetometer (VSM) 22
2.2.3 Mangeto-Optic Kerr Effect (MOKE) Measurement 23
2.2.4 Tactile Tester 24
ⅠII. THEORETICAL BACKGROUND
3.1 Planar Hall Magnetoresistance sensing element 26
3.2 Magnetostriction
3.2.1 Definition and Fundamental principle 30
3.2.2 Materials 33
3.3 Stress and Strain in Polymer Bending 34

ⅠV. RESULT AND DISCUSSION
4.1 Bending Stability of PHMR Sensor 36
4.1.1 Types and Basic performance of Flexible PHMR Sensor 37
4.1.2 Enhancing Bending Stability 42
4.2 Pressure-Insensitive PHMR Shear Force Sensor 47
4.2.1 Sensing Concept using a Pillar structure 48
4.2.2 Shear Force Sensor Components 55
4.2.3 Characterization 57
4.2.4 Basic Performance 58
4.2.5 Application Experiment Ⅰ: Flow velocity detection 61
4.2.6 Application Experiment ⅠⅠ: Braille Reading 64
4.3 Magnetic Pad PHMR Pressure Sensor 67
4.3.1 Sensing Concept using a Magnetic Pad 69
4.3.2 Basic Performance 71
4.4 Tactile Sensing Module through Integration 75

V. Conclusion
5.1 Conclusion of this study 77
References 78
Summary 83

URI

http://hdl.handle.net/20.500.11750/48017
http://dgist.dcollection.net/common/orgView/200000729006

DOI

10.22677/THESIS.200000729006

Degree

Doctor

Department

Department of Physics and Chemistry

Publisher

DGIST

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