Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Kong, Bo Hyun | - |
dc.contributor.author | Choi, Mi Kyung | - |
dc.contributor.author | Cho, Hyung Koun | - |
dc.contributor.author | Kim, Jae Hyun | - |
dc.contributor.author | Baek, Sungho | - |
dc.contributor.author | Lee, Jung-Ho | - |
dc.date.accessioned | 2024-03-15T16:19:37Z | - |
dc.date.available | 2024-03-15T16:19:37Z | - |
dc.date.created | 2017-04-10 | - |
dc.date.issued | 2010 | - |
dc.identifier.issn | 1099-0062 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/56476 | - |
dc.description.abstract | Al-doped ZnO (AZO) thin films were grown by atomic layer deposition (ALD) for use as transparent conductive oxides on high aspect ratio Si microrod arrays. The ALD-deposited AZO films showed high optical transmittance and electrical conductivity despite their polycrystalline structures and resulted in a superior conformal coating on the surface and side regions of the Si microrods. The films also exhibited an electrical performance identical to that of the AZO film on a flat Si substrate. These results revealed that ALD-deposited AZO films are promising candidates for electrodes in the next-generation optoelectronic devices based on low dimensional structures, which require conformal coating. © 2009 The Electrochemical Society. | - |
dc.publisher | Electrochemical and Solid-State | - |
dc.title | Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods | - |
dc.type | Article | - |
dc.identifier.doi | 10.1149/1.3267051 | - |
dc.identifier.wosid | 000272838700024 | - |
dc.identifier.scopusid | 2-s2.0-74249113901 | - |
dc.identifier.bibliographicCitation | Electrochemical and Solid State Letters, v.13, no.2, pp.K12 - K14 | - |
dc.subject.keywordPlus | ABSORPTION | - |
dc.subject.keywordPlus | Al-Doped ZnO | - |
dc.subject.keywordPlus | Aluminum | - |
dc.subject.keywordPlus | Aspect Ratio | - |
dc.subject.keywordPlus | Atomic Layer Deposition | - |
dc.subject.keywordPlus | AZO Films | - |
dc.subject.keywordPlus | Coatings | - |
dc.subject.keywordPlus | Conductive Films | - |
dc.subject.keywordPlus | Conformal Coatings | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | Electric Conductivity | - |
dc.subject.keywordPlus | Electrical Conductivity | - |
dc.subject.keywordPlus | Electrical Performance | - |
dc.subject.keywordPlus | Electrodes | - |
dc.subject.keywordPlus | High Aspect Ratio | - |
dc.subject.keywordPlus | LIGHT-emITTING DEVICES | - |
dc.subject.keywordPlus | Low Dimensional Structure | - |
dc.subject.keywordPlus | Microrods | - |
dc.subject.keywordPlus | Optical Films | - |
dc.subject.keywordPlus | Optical Transmittance | - |
dc.subject.keywordPlus | Optoelectronic Devices | - |
dc.subject.keywordPlus | OXIDE | - |
dc.subject.keywordPlus | Photoresists | - |
dc.subject.keywordPlus | Polycrystalline Structure | - |
dc.subject.keywordPlus | Pressure Drop | - |
dc.subject.keywordPlus | SCATTERING | - |
dc.subject.keywordPlus | Si Substrates | - |
dc.subject.keywordPlus | Silicon | - |
dc.subject.keywordPlus | Silicon Nanowires | - |
dc.subject.keywordPlus | SOLAR-CELLS | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | Transparent Conductive Oxides | - |
dc.subject.keywordPlus | Transparent Electrode | - |
dc.subject.keywordPlus | Zinc Oxide | - |
dc.subject.keywordPlus | ZnO:Al Films | - |
dc.citation.endPage | K14 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | K12 | - |
dc.citation.title | Electrochemical and Solid State Letters | - |
dc.citation.volume | 13 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Electrochemistry; Materials Science | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry; Materials Science, Multidisciplinary | - |
dc.type.docType | Article | - |
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