Full-dry flipping transfer method for van der waals heterostructure

Abstract

We present a novel flipping transfer method for van der Waals heterostructures, offering a significant advancement over previous techniques by eliminating the need for polymers and solvents. Here, we utilize commercially available gel film and control its stickiness through oxygen plasma and UV-Ozone treatment, also effectively removing residues from the gel film surface. The cleanliness of the surface is verified through atomic force microscopy. We investigate the quality of our fabricated devices using magnetotransport measurements on graphene/hBN and graphene/α-RuCl3 heterostructures. Remarkably, graphene/hBN devices produced with the flipping method display quality similar to that of fully encapsulated devices. This is evidenced by the presence of a symmetry-broken state at 1 T. Additionally, features of the Hofstadter butterfly were also observed in the second devices. In the case of graphene/α-RuCl3, we observe quantum oscillations with a beating mode and two-channel conduction, consistent with fully encapsulated devices. © 2023 Korean Physical Society