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Planar Metastructure-based Gas Sensors for High Stretchability and Stable NO2 Sensing

Title
Planar Metastructure-based Gas Sensors for High Stretchability and Stable NO2 Sensing
Author(s)
Park, JeonhyeongLim, HyeoncheolRyu, Chae HyunJung, Soon InJang, Il RyuKim, Hoe Joon
Issued Date
2023-06-29
Citation
22nd International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2023, pp.792 - 795
Type
Conference Paper
ISBN
9784886864352
ISSN
2167-0021
Abstract
The paper presents a flexible and stretchable carbon nanotube (CNT) based gas sensor fabricated on a planar metastructure, kirigami substrate with anatase TiO2 functionalization for improved NO2 sensing performances with high stretchability. The developed kirigami-based sensor possesses a network of notches with high softness and stretchability, ensuring a stable sensor operation of up to 80% strain. Such a high strain range overcomes the current limitation of gas sensors, which generally utilize rather brittle and rigid sensing materials. The innovative claims include (1) the utilization of kirigami architecture to mitigate the uniaxial strain effect and (2) the enhancement of sensor performance regarding the sensitivity and recovery time owing to TiO2 functionalization. Mechanical properties of the kirigami structure can be analyzed via stress-strain relation, and the sensing material properties are characterized using Fourier-transform infrared spectroscopy (FT-IR) and Raman spectroscopy. The suggested kirigami-based gas sensors could be applied to wearable and stretchable gas sensing applications. © 2023 IEEJ.
URI
http://hdl.handle.net/20.500.11750/56840
Publisher
Transducer Research Foundation
Related Researcher
  • 김회준 Kim, Hoe Joon
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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Department of Robotics and Mechatronics Engineering Nano Materials and Devices Lab 2. Conference Papers

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