Changyeop Jeon. (2025). Development of 3D E-Compass Using Advanced Planar Hall Magnetoresistance Sensor with Superparamagnetic Flux Guide. doi: 10.22677/THESIS.200000828597
Type
Thesis
Description
Magnetic sensor, Magnetoresistance, Planar Hall Magnetoresistance, 3D magnetic sensor, Magnetic Composite
Table Of Contents
Ⅰ. Introduction 1 1.1 Motivation 1 1.2 Trends of Study 4 1.2.1 3 axis Magnetic Sensor 4 1.2.2 Magnetic Polymer Composite 9 1.3 Needs for this study 12 Ⅱ. Materials and Method 14 2.1 Materials 14 2.2 Fabrication of 1D PHMR sensor 14 2.2.1 Lift-off Process 14 2.2.2 Photolithography Process 16 2.2.3 DC Sputtering 18 2.2.4 Magnetron Sputtering 20 2.3 Fabrication of SPMFG on PHMR Sensor 21 2.3.1 Inkjet Printing 21 2.4 Measurement System 24 2.4.1 Vibrating Sample Magnetometer 24 2.4.2 MR Measurement System 25 2.4.3 Noise Measurement System 25 Ⅲ. Planar Hall Magnetoresistance Sensor 28 3.1 Introduction of PHMR Sensor 28 3.1.1 Characterizing Hysteresis-Free Behavior in Magnetic Field response 30 3.1.2 Resistivity Tensor in Magnetic Thin Film 31 3.2 Structure of PHMR Sensor with Exchange Bias system 35 3.2.1 Bilayer 35 3.2.2 Trilayer 39 3.3 Design of the PHMR Sensor 41 3.3.1 Ring-type PHMR Sensor 44 3.4 Noise Characteristics in PHMR Sensor 47 Ⅳ. Result and Discussion 51 4.1 Analysis of PHMR Sensor with Operation mode 51 4.1.1 Analysis of Current Density in Multilayer Thin Films 53 4.1.2 Characteristics of PHMR Sensor in CC mode 57 4.1.3 Characteristics of PHMR Sensor in CV mode 60 4.2 Analysis of Offset Voltage in PHMR Sensor 65 4.2.1 PHMR Sensor with Multi-electrode system 66 4.2.2 Analysis of Offset Voltage in Cross-Type PHMR Sensor 68 4.2.3 Phase Shift of Sensor Signal depending on Applied Current Angle 72 4.2.4 Phase Shift of Sensor Signal depending on Signal Measurement Angle 77 4.2.5 Analysis of Offset Voltage in Multi-Ring type PHMR Sensor 81 4.3 Multiaxial Annealing Process and 2D PHMR Sensor 83 4.3.1 Superparamagnetic Flux Guide 87 4.3.2 Multi-axis Annealing and 2D PHMR Sensor 90 4.4 Design of 3D PHMR Sensor with SPMFG 92 4.4.1 PHMR-SPMFG Integration for Z-axis Magnetic Field Sensing 92 4.4.2 3-Axis Magnetic Field Detection with SPMFG Integration 96 4.4.3 Magnetic Field-induced Particle Alignment in SPMFG Fabrication 100 Ⅴ. Conclusion 104 5.1 Conclusion of this study 104 References 105 Summary 109
