Title

Flexible FeGa-Based Strain Gauge for Advanced Mechanical Sensing Applications

Alternative Title

고급 기계 감지 애플리케이션을 위한 유연한 FeGa 기반 스트레인 게이지

DGIST Authors

Hyeji Kim ; CheolGi Kim ; JungIl Hong

Advisor

김철기

Co-Advisor(s)

JungIl Hong

Issued Date

2025

Awarded Date

2025-02-01

Citation

Hyeji Kim. (2025). Flexible FeGa-Based Strain Gauge for Advanced Mechanical Sensing Applications. doi: 10.22677/THESIS.200000839739

Type

Thesis

Description

Flexible strain gauge, Reverse magnetostriction, FeGa, Robot joint movement detection, Magnetic Anti-Interference Pattern

Table Of Contents

List of Contents
Abstract i
List of contents ii
List of tables iv
List of figures iv

Ⅰ. Introduction
1.1 Motivation 1
1.2 Trends of Study 3
1.3 The necessity of study 12
Ⅱ. Theoretical Background
2.1 Sensor Design 13
2.1.1 Magnetoresistance 13
2.1.2 Conceptual Design and Rationale 15
2.2 Magnetostriction 20
2.2.1 Definition and Fundamental principle 20
2.2.2 Strain Properties of FeGa 21
Ⅲ. Materials and Methods
3.1 Materials 23
3.1.1 Flexible Substrate 23
3.1.2 Sensor 24
3.1.3 Encapsulation 25
3.2 Fabrication of Sensor 27
3.2.1 Photolithography. 27
3.2.2 Thin film Deposition process 30
3.2.3 Lift off 33
3.2.4 Encapsulation 34
3.3 Entire process 35
3.4 Measurement system 36
3.4.1 Magnetic moment 36
3.4.2 MR Sensor signal 38
Ⅳ. Results and Discussions
4.1 Magnetic Property Analysis of FeGa thin film 39
4.1.1 Magnetostriction Characteristics 39
4.1.2Magnetoresistance (MR) measurement 45
4.2 Sensor Signal Measurement under Applied Strain 47
4.3 Application 51
Ⅴ. Conclusion
5.1 Conclusion 53

References 54
Summary 57

URI

http://hdl.handle.net/20.500.11750/58064
http://dgist.dcollection.net/common/orgView/200000839739

DOI

10.22677/THESIS.200000839739

Degree

Master

Department

Department of Physics and Chemistry

Publisher

DGIST

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