Title

Lithography-Based Fabrication of Patternable Magnetic Polymer Composite and Its Applications

Alternative Title

리소그래피 기반 패터닝 가능한 자기 폴리머 복합체의 제조 및 응용

DGIST Authors

SungHyeok Lee ; CheolGi Kim ; Jung-Il Hong

Advisor

김철기

Co-Advisor(s)

Jung-Il Hong

Issued Date

2025

Awarded Date

2025-02-01

Citation

SungHyeok Lee. (2025). Lithography-Based Fabrication of Patternable Magnetic Polymer Composite and Its Applications. doi: 10.22677/THESIS.200000828582

Type

Thesis

Description

Lithography, Z-axis arrangement Fe₃O₄ , PHMR sensor, Magnetophoretic circuit, Cell delivery boat

Table Of Contents

Abstract ⅰ
List of contents ⅱ
List of tables ⅳ
List of figures ⅳ

Ⅰ. Introduction 1
1.1 Motivation 1
1.2 Trends of study 3
1.3. The necessity of study 5

Ⅱ. Background 8
2.1 Dipole-dipole interaction 8
2.2 Magnetic flux gradient 10

Ⅲ. Materials and method 12
3.1 Materials 12
3.1.1 Photoresist 12
3.1.2 Magnetism 13
3.2 Method 16
3.2.1 Photo-lithography 16
3.2.2 Sputtering 19

Ⅳ. Experiments 22
4.1 Fabrication 22
4.1.1 Magnetic polymer composite (MPC) 22
4.1.2 Z-axis magnetic field application equipment 24
4.1.3 Lithography-compatible magnetic polymer composite 25
4.2 Application 28
4.2.1 Magnetophoretic circuit 28
4.2.2 Cell delivery boat 30
4.2.3 Device integration 33
4.3 Measurement 38
4.3.1 Vibrating Sample Magnetometer (VSM) 38
4.3.2 Scanning Electron Microscope (SEM) 39
4.3.3 Ultraviolet-Visible-Near Infrared Spectrophotometer 40
4.3.4 Magnetoresistance (MR) measurement 41
4.3.5 Rotating field Microscope 42

Ⅴ. Result and Discussion 43
5.1 MPC properties 43
5.2 Magnetophoretic circuit 49
5.3 Cell delivery boat 51
5.4 Device integration 53

Ⅵ. Conclusion 56

References 58
Summary 60

URI

http://hdl.handle.net/20.500.11750/58068
http://dgist.dcollection.net/common/orgView/200000828582

DOI

10.22677/THESIS.200000828582

Degree

Master

Department

Department of Physics and Chemistry

Publisher

DGIST

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