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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김준서 | - |
| dc.contributor.author | 김준우 | - |
| dc.date.accessioned | 2025-11-18T15:10:17Z | - |
| dc.date.available | 2025-11-18T15:10:17Z | - |
| dc.identifier.uri | https://scholar.dgist.ac.kr/handle/20.500.11750/59201 | - |
| dc.description.abstract | A motorized shutter module of a sputtering ion source may be provided according to one aspect of the present invention, the motorized shutter module comprising: a first shutter installed to open and close a target at a front side of a sputtering ion source; a first opening and closing device unit to which one end of the first shutter is connected and which operates the first shutter to open and close in a direction orthogonal to the target; and a first motor providing power to the first opening and closing device unit. | - |
| dc.title | MOTORIZED SHUTTER MODULE OF SPUTTERING ION SOURCE | - |
| dc.title.alternative | Motorized shutter of sputtering ion source | - |
| dc.type | Patent | - |
| dc.publisher.country | UN | - |
| dc.identifier.patentApplicationNumber | PCT/KR2025/001455 | - |
| dc.date.application | 2025-01-24 | - |
| dc.identifier.patentRegistrationNumber | 2025173969 | - |
| dc.date.registration | 2025-08-21 | - |
| dc.contributor.assignee | DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY,재단법인대구경북과학기술원 | - |
| dc.type.iprs | 특허 | - |
