Title

Breathable Nanomesh-Enabled Piezoelectric Energy Harvester with Single-Crystal BaTiO₃ Thin Films

Alternative Title

나노메쉬 기반의 무기 세라믹 압전 에너지하베스터 제작 및 분석

DGIST Authors

Gain Jang ; Sungwon Lee

Advisor

이성원

Issued Date

2026

Awarded Date

2026-02-01

Type

Thesis

Description

Piezoelectric generator, Breathable device, Biocompatible, Conformal contact

Table Of Contents

Ⅰ. Introduction
1.1 Background of Research 1
1.1.1 Technologies of wearable device 1
1.1.2 Trend of energy harvester 4
1.1.3 Breathable and flexible polymer nanomesh substrate 6
1.2 Ceramic piezoelectric energy harvester 8
1.2.1 Piezoelectric materials 8
1.2.2 Ferroelectric BaTiO3 inorganic material 10
1.2.3 Flexible devices fabricated via chemical transfer 12
Ⅱ. Experimental procedure
2.1 Fabrication of nanomesh inorganic piezoelectric energy harvester 14
2.2 Characterization of BTO membrane 16
Ⅲ. Result and discussion
3.1 Optimization of PLD conditions for BTO 17
3.1.1 XRD of BTO at varying oxygen partial pressures in PLD 17
3.1.2 XRD of BTO at substrate temperature pressures in PLD 17
3.1.3 θ-2θ XRD data of the optimized BTO thin film 17
3.2 θ-2θ scan XRD data of SAO/BTO deposition & After transfer 21
3.3 Crystalline quality of the BTO thin film 23
3.4 Leakage current of BTO thin film 27
3.5 Piezoelectric & Ferroelectric results of BTO thin film 28
3.6 Transfer of the BTO thin film onto the nanomesh 31
3.7 Energy harvester 32
3.7.1 Output performance of the piezoelectric harvester 32
3.7.2 Multi-deformable test 33
3.7.3 Energy conversion efficiency 34

URI

https://scholar.dgist.ac.kr/handle/20.500.11750/59745
http://dgist.dcollection.net/common/orgView/200000942733

DOI

10.22677/THESIS.200000942733

Degree

Master

Department

Department of Physics and Chemistry

Publisher

DGIST

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