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  Department of Physics and Chemistry Theses Ph.D.

Optimization of Seed Layer Material and Substrate for Signal Enhancement of Magnetoresistive Sensor

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dc.contributor.advisor 김철기 -
dc.contributor.author Sharma Pranita -
dc.date.accessioned 2026-01-23T11:00:38Z -
dc.date.available 2026-01-23T11:00:38Z -
dc.date.issued 2025 -
dc.identifier.uri https://scholar.dgist.ac.kr/handle/20.500.11750/59800 -
dc.identifier.uri http://dgist.dcollection.net/common/orgView/200000889031 -
dc.description Planar Hall Magnetoresistance (PHMR), Seed Layer Engineering, Heavy Metal/Ferromagnet Bilayers, Inverse Spin Hall Effect (ISHE), Spin Hall Magnetoresistance (SMR) -
dc.description.tableofcontents Abstract----------(i)
Table of Contents--------(iii)
List of figures--------(v)
List of tables---------(vii)
Outline of the thesis----------(xi)
1. Introduction -------------1
1.1. Magnetoresistance in thin film
1.1.1. AMR------------4
1.1.2. PHMR--------------6
1.1.3. SMR------------8
1.2. Sensitivity of PHMR sensors--------11
1.3. Role of Interface Engineering in Magnetoresistance--------12
1.3.1. Seed Layer effect----------13
1.3.2. Capping Layer effect---------15
1.4. Spin–Orbit Coupling and Spin Transport in HM/FM Systems---------16
2. Experimental techniques-----------18
2.1. Materials-----------18
2.2. Sample fabrication--------18
2.2.1. Photolithography---------18
2.2.2. DC magnetron sputtering system (deposition rate) -------19
2.2.2.1. Determination of Deposition rate-----------20
2.2.2.2. Sensor deposition------------20
2.2.2.3. Electrode deposition--------------20
2.2.3. Liftoff-------------21
2.3. Sample characterization-----------22
2.3.1. Planar hall effect measurements--------------22
2.3.2. Angle Dependent Magnetoresistance measurement (ADMR)------------- 23
2.3.3. SQUID Magnetometry-----------24
2.3.4. Grazing Incidence X-ray Diffraction (GIXRD) ------25
2.3.5. High Resolution- Transmission Electron Microscopy-------------25
2.3.6. X-Ray Photon Spectroscopy---------26
2.3.7. Ferromagnetic Resonance (FMR) and Inverse Spin Hall Effect (ISHE)
Measurements---------27
2.3.8. X-ray Reflectivity (XRR)----------27
3. Tailoring of sensor output and sensitivity by material and thickness of seed layer---------29
3.1. Seed layer material and thickness effect on Sensor output and sensitivity-----29
3.2. Seed layer material and thickness effect on structural properties of sensing layer----37
3.3. Seed layer material and thickness effect on magnetic properties of sensing layer----42
4. Seed layer material and thickness effect on magnetization dynamics of sensing layer--45
4.1. Seed a layer material and thickness on Ferromagnetic resonance and Gilberts
damping---------45
4.2. Inverse spin hall effect measurements---------53
4.3. Spin hall magnetoresistance and its effect on Total MR measurement----------57
5. Substrate-Dependent Planar Hall Sensor measurements------------65
Conclusion and Perspective----------71
References--------------72
List of Publications---------------80		 -
dc.format.extent 82 -
dc.language eng -
dc.publisher DGIST -
dc.title Optimization of Seed Layer Material and Substrate for Signal Enhancement of Magnetoresistive Sensor -
dc.title.alternative 자기저항 센서의 성능 향상을 위한 시드층 및 기판 최적화 -
dc.type Thesis -
dc.identifier.doi 10.22677/THESIS.200000889031 -
dc.description.degree Doctor -
dc.contributor.department Department of Physics and Chemistry -
dc.contributor.coadvisor Chun-Yeol You -
dc.date.awarded 2025-08-01 -
dc.publisher.location Daegu -
dc.description.database dCollection -
dc.citation XT.MD SH531 202508 -
dc.date.accepted 2025-07-21 -
dc.contributor.alternativeDepartment 화학물리학과 -
dc.subject.keyword Planar Hall Magnetoresistance (PHMR), Seed Layer Engineering, Heavy Metal/Ferromagnet Bilayers, Inverse Spin Hall Effect (ISHE), Spin Hall Magnetoresistance (SMR) -
dc.contributor.affiliatedAuthor Sharma Pranita -
dc.contributor.affiliatedAuthor CheolGi Kim -
dc.contributor.affiliatedAuthor Chun-Yeol You -
dc.contributor.alternativeName 프라니타 -
dc.contributor.alternativeName CheolGi Kim -
dc.contributor.alternativeName 유천열 -
dc.rights.embargoReleaseDate 2030-08-31 -
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