Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Byeongdae | ko |
dc.contributor.author | Allabergenov, Bunyod | ko |
dc.contributor.author | Lyu, Hong-Kun | ko |
dc.contributor.author | Lee, Seong Eui | ko |
dc.date.accessioned | 2018-06-18T00:02:06Z | - |
dc.date.available | 2018-06-18T00:02:06Z | - |
dc.date.created | 2018-06-15 | - |
dc.date.issued | 2018-06 | - |
dc.identifier.citation | Applied Physics Express, v.11, no.6 | - |
dc.identifier.issn | 1882-0778 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/6604 | - |
dc.description.abstract | We deposited a 300-nm-thick Ga2O3 thin film on an amorphous SiO2/Si substrate via pulsed laser deposition. X-ray diffraction patterns revealed the formation of β-Ga2O3 phase at a substrate temperature of 700 °C. X-ray photoelectron spectra indicated that the degree of oxidation increased after annealing at 700 °C. Further annealings at higher temperatures led to a transition of the β-Ga2O3 phase to the α-Ga2O3 phase; this transition was caused by the twin structure formed during the crystallinity improvement process. In addition, we discuss the mechanism of the transition from the β phase to the α phase in the β-Ga2O3 thin films. © 2018 The Japan Society of Applied Physics. | - |
dc.language | English | - |
dc.publisher | Japan Soc of Applied Physics | - |
dc.subject | GALLIUM OXIDE | - |
dc.subject | ALPHA | - |
dc.subject | BETA | - |
dc.title | Twin-induced phase transition from beta-Ga2O3 to alpha-Ga2O3 in Ga2O3 thin films | - |
dc.type | Article | - |
dc.identifier.doi | 10.7567/APEX.11.061105 | - |
dc.identifier.wosid | 000433074500001 | - |
dc.identifier.scopusid | 2-s2.0-85047954415 | - |
dc.type.local | Article(Overseas) | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.contributor.nonIdAuthor | Allabergenov, Bunyod | - |
dc.contributor.nonIdAuthor | Lee, Seong Eui | - |
dc.identifier.citationVolume | 11 | - |
dc.identifier.citationNumber | 6 | - |
dc.identifier.citationTitle | Applied Physics Express | - |
dc.type.journalArticle | Article | - |
dc.description.isOpenAccess | N | - |
dc.contributor.affiliatedAuthor | Choi, Byeongdae | - |
dc.contributor.affiliatedAuthor | Lyu, Hong-Kun | - |
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